COOLVAC 2000 iSL-H - DN 250 ISO-K

クライオテクノロジー

Cryogenic systems are widely used in the vacuum industry for their ability to achieve ultra-low temperatures and create high vacuum conditions. These systems consist of a compressor unit and a cryogenic refrigerator, which work together to generate a cold environment. Cryogenic pumps are also used for vacuum operations, offering high pumping speeds and low ultimate pressures. Cryogenic technology is popular in industries such as semiconductor manufacturing, scientific research, and space exploration

LEYBOLD CRYOGENIC SYSTEMS - Intelligent. Smart. Economical

With regard to the increasing requirements of the market, Leybold fulfils the expectations of customers with its new range of cryogenic systems combining performant components. The cryogenic systems offer a great range of economical products which can be easily combined to meet your application's requirements.

The Leybold cooling systems consist of: COOLPAK e: Compressor unit & COOLPOWER e: Cryogenic refrigerator

The cryogenic pump systems consist of: COOLPAK e: Compressor unit & COOLVAC e: Cryogenic pump

COOLVAC

COOLVAC vacuum pumps are refrigerator cryo pumps which generate a vacuum when gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation. They are used for the generation of ultra-high vacuum.

Because of the pumping principle COOLVAC cryo pumps have a high effective pumping speed for all gases. COOLVAC vacuum pumps produce a hydrocarbon free ultra-high vacuum in the pressure range from 10-3 mbar to 10-11 mbar.

All cryo pumps from the COOLVAC range are equipped with all safety related components, particularly with a safety valve which is equipped with an additional DN 40 KF flange for connection of an exhaust line.

The pump’s body is made of high-quality stainless steel. Helium compressors from the COOLPAK e range are required for operating the COOLPOWER i cold heads, which are incorporated within the COOLVAC i range of cryo pumps.

iSmartLine (eSL)

The cryo pumps from the iSmartLine (eSL) range are gradually heated up to room temperature by means of electrical heaters at both cold head stages. Pressure, temperature and heating power are monitored by the COOL.DRIVE I controller.

iBasicLine (eBL)

In the case of cryo pumps from the iBasicLine (eBL) range, regeneration takes place manually in two sub-steps:

Switching off the refrigerator system and waiting until room temperature is reached

Re-cooling after a sufficiently low pressure is reached in the cryo pump. The COOLVAC cryo pumps of the iBasicLine version are identical to the COOLVAC cryo pumps of the eSL version concerning the technical data for pumping speed, capacity, cooldown time, built-in cold heads, maximum throughput, built-in temperature sensors for the second stage (Si diode) and the corresponding current feedthroughs.

The iBasicLine models do not include the COOL.DRIVE i controller as well as heaters, gauges and fore vacuum valve.